Published June 2008 | Version v1
Journal article

Effects of 120 keV nitrogen and its fluence on the structural, electrical, and optical properties of ZnO film

  • 1. School of Physics, Peking University, Beijing 100871 (China)
  • 2. Department of Physics, University of Science and Technology of China, Hefei 230026 (China)

Description

P-type ZnO film was obtained by N-implantation at energy of 120 keV with annealing at 850 deg. C in oxygen. Room temperature Hall effect measurements revealed that the carrier concentration and mobility was 9.95 x 1018 cm-3 and 14.3 cm2/vs, respectively, in the implanted ZnO with optimal fluence of 1015 N/cm2, where more N acceptors were activated as confirmed by X-ray diffraction and photoluminescence. The increase of lattice constants and appearance of emission peaks at 3.26 and 3.18 eV after implantation indicated that the p-type ZnO was realized by substitution of N atom for O sublattice

Availability note (English)

Available from http://dx.doi.org/10.1016/j.nimb.2008.03.148

Additional details

Identifiers

DOI
10.1016/j.nimb.2008.03.148;
PII
S0168-583X(08)00426-6;

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
Journal Volume
266
Journal Issue
12-13
Journal Page Range
p. 2962-2965
ISSN
0168-583X
CODEN
NIMBEU

Conference

Title
14. international conference on radiation effects in insulators
Acronym
REI-14
Dates
28 Aug - 1 Sep 2007
Place
Caen (France)

INIS

Country of Publication
Netherlands
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
40011886
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ANNEALING; FILMS; HALL EFFECT; KEV RANGE 100-1000; LATTICE PARAMETERS; NITROGEN; OPTICAL PROPERTIES; OXYGEN; PHOTOLUMINESCENCE; TEMPERATURE RANGE 0273-0400 K; X-RAY DIFFRACTION; ZINC OXIDES
Descriptors DEC
CHALCOGENIDES; COHERENT SCATTERING; DIFFRACTION; ELEMENTS; EMISSION; ENERGY RANGE; HEAT TREATMENTS; KEV RANGE; LUMINESCENCE; NONMETALS; OXIDES; OXYGEN COMPOUNDS; PHOTON EMISSION; PHYSICAL PROPERTIES; SCATTERING; TEMPERATURE RANGE; ZINC COMPOUNDS

Optional Information

Copyright
Copyright (c) 2008 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.