Published June 2008
| Version v1
Journal article
Effects of 120 keV nitrogen and its fluence on the structural, electrical, and optical properties of ZnO film
- 1. School of Physics, Peking University, Beijing 100871 (China)
- 2. Department of Physics, University of Science and Technology of China, Hefei 230026 (China)
Description
P-type ZnO film was obtained by N-implantation at energy of 120 keV with annealing at 850 deg. C in oxygen. Room temperature Hall effect measurements revealed that the carrier concentration and mobility was 9.95 x 1018 cm-3 and 14.3 cm2/vs, respectively, in the implanted ZnO with optimal fluence of 1015 N/cm2, where more N acceptors were activated as confirmed by X-ray diffraction and photoluminescence. The increase of lattice constants and appearance of emission peaks at 3.26 and 3.18 eV after implantation indicated that the p-type ZnO was realized by substitution of N atom for O sublattice
Availability note (English)
Available from http://dx.doi.org/10.1016/j.nimb.2008.03.148Additional details
Identifiers
- DOI
- 10.1016/j.nimb.2008.03.148;
- PII
- S0168-583X(08)00426-6;
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
- Journal Volume
- 266
- Journal Issue
- 12-13
- Journal Page Range
- p. 2962-2965
- ISSN
- 0168-583X
- CODEN
- NIMBEU
Conference
- Title
- 14. international conference on radiation effects in insulators
- Acronym
- REI-14
- Dates
- 28 Aug - 1 Sep 2007
- Place
- Caen (France)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 40011886
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ANNEALING; FILMS; HALL EFFECT; KEV RANGE 100-1000; LATTICE PARAMETERS; NITROGEN; OPTICAL PROPERTIES; OXYGEN; PHOTOLUMINESCENCE; TEMPERATURE RANGE 0273-0400 K; X-RAY DIFFRACTION; ZINC OXIDES
- Descriptors DEC
- CHALCOGENIDES; COHERENT SCATTERING; DIFFRACTION; ELEMENTS; EMISSION; ENERGY RANGE; HEAT TREATMENTS; KEV RANGE; LUMINESCENCE; NONMETALS; OXIDES; OXYGEN COMPOUNDS; PHOTON EMISSION; PHYSICAL PROPERTIES; SCATTERING; TEMPERATURE RANGE; ZINC COMPOUNDS
Optional Information
- Copyright
- Copyright (c) 2008 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.