Diffraction vacuum x-ray photoelectron spectrometer

The high-vacuum x-ray spectrometer described is designed for the analysis of the structure of surface layers and the surface of crystalline solids by the method of standing x-ray waves. The basic part of the instrument consists of a set of monochromators with two crystals and a vacuum chamber (pressure ∼ 10-9 torr) with manipulators and an airlock. Inside the chamber are the goniometer for the sample, with a torsion drive than ensures backlash-free rotation in the angle range ∼ 10', and a system for the energy analysis of photoelectrons and Auger electrons. The drive permits operation with an ordinary x-ray tube or with a stationary high-power source, simultaneously recording the x-ray diffraction reflection and photoemission curves in the range of diffraction angles from 12 to 800.by