Buffer layer investigations on MFIS capacitors consisting of ferroelectric poly[vinylidene fluoride trifluoroethylene]
- 1. Brandenburg University of Technology, Chair Applied Physics and Sensors, K.-Wachsmann-Alle 17, 03046 Cottbus (Germany)
Description
In this paper we present capacitance-voltage (CV) measurements on metal-ferroelectric-insulator-semiconductor (MFIS) capacitors with poly[vinylidene fluoride trifluoroethylene] (P[VDF/TrFE] as ferroelectric layer and SiO2, Al2O3 and HfO2 as buffering insulator layer. In order to discuss our data in a quantitative manner we perform fits to the data based on a model proposed by Miller and McWorther. The improvement of the polarization values and subsequently its effect on the hysteresis of the CV curve by the successive shrinking of the buffer layer thickness and the following choice of a high-k buffer material is demonstrated. Our data underline that a saturated polarization of P[VDF/TrFE] cannot be controlled with a SiO2 buffer layer and the insertion of a high-k buffer layer is essential for further improvements of the characteristics of MFIS stacks.
Availability note (English)
Available from http://dx.doi.org/10.1088/1757-899X/8/1/012036Additional details
Identifiers
Publishing Information
- Journal Title
- IOP Conference Series. Materials Science and Engineering (Online)
- Journal Volume
- 8
- Journal Issue
- 1
- Journal Page Range
- [5 p.]
- ISSN
- 1757-899X
Conference
- Title
- Symposium G - Fundamentals and technology of multifunctional oxide thin films
- Acronym
- E-MRS 2009 spring meeting
- Dates
- 8-12 Jun 2009
- Place
- Strasbourg (France)
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 43019041
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ALUMINIUM OXIDES; BUFFERS; CAPACITANCE; CAPACITORS; FERROELECTRIC MATERIALS; HAFNIUM OXIDES; HYSTERESIS; LAYERS; POLARIZATION; POLYVINYLS; SEMICONDUCTOR MATERIALS; SILICA; SILICON OXIDES
- Descriptors DEC
- ALUMINIUM COMPOUNDS; CHALCOGENIDES; DIELECTRIC MATERIALS; ELECTRICAL EQUIPMENT; ELECTRICAL PROPERTIES; EQUIPMENT; HAFNIUM COMPOUNDS; MATERIALS; MINERALS; ORGANIC COMPOUNDS; ORGANIC POLYMERS; OXIDE MINERALS; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; POLYMERS; REFRACTORY METAL COMPOUNDS; SILICON COMPOUNDS; TRANSITION ELEMENT COMPOUNDS