Published October 10, 1993
| Version v1
Journal article
Laser lithography by photon scanning tunneling microscopy
Creators
- 1. Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, Tennessee 37831-6123 (United States)
Description
We have investigated the possibility of using a photon scanning tunneling microscopy (PSTM) for laser lithography. A contrast enhancement material (CEM) is coated onto a sample slide and coupled to the prism of a PSTM. The CEM becomes transparent above a laser (HeCd at a wavelength of 442 nm) intensity threshold attained due to the proximity of the probe tip. The same surface can then be inspected using the given experimental configuration by replacing the HeCd laser line with a non-exposing 633-nm HeNe laser line. Direct patterns can be produced by varying the exposure time and the shape of the probe tip
Additional details
Publishing Information
- Journal Title
- AIP Conference Proceedings
- Journal Volume
- 288
- Journal Issue
- 1
- Journal Page Range
- p. 544-549.
- ISSN
- 0094-243X
- CODEN
- APCPCS
Conference
- Title
- mechanisms and applications.
- Acronym
- 2. international conference on laser ablation
- Dates
- 19-22 Apr 1993.
- Place
- Knoxville, TN (United States).
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 25045056
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- COATINGS; IMAGES; LASER RADIATION; MEASURING METHODS; OPTICAL MICROSCOPY; PHOTON EMISSION SCANNING
- Descriptors DEC
- DIAGNOSTIC TECHNIQUES; ELECTROMAGNETIC RADIATION; MICROSCOPY; RADIATIONS
Optional Information
- Secondary number(s)
- CONF-9304144--.