Published October 10, 1993 | Version v1
Journal article

Laser lithography by photon scanning tunneling microscopy

  • 1. Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, Tennessee 37831-6123 (United States)

Description

We have investigated the possibility of using a photon scanning tunneling microscopy (PSTM) for laser lithography. A contrast enhancement material (CEM) is coated onto a sample slide and coupled to the prism of a PSTM. The CEM becomes transparent above a laser (HeCd at a wavelength of 442 nm) intensity threshold attained due to the proximity of the probe tip. The same surface can then be inspected using the given experimental configuration by replacing the HeCd laser line with a non-exposing 633-nm HeNe laser line. Direct patterns can be produced by varying the exposure time and the shape of the probe tip

Additional details

Publishing Information

Journal Title
AIP Conference Proceedings
Journal Volume
288
Journal Issue
1
Journal Page Range
p. 544-549.
ISSN
0094-243X
CODEN
APCPCS

Conference

Title
mechanisms and applications.
Acronym
2. international conference on laser ablation
Dates
19-22 Apr 1993.
Place
Knoxville, TN (United States).

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
25045056
Subject category
S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
Resource subtype / Literary indicator
Conference
Descriptors DEI
COATINGS; IMAGES; LASER RADIATION; MEASURING METHODS; OPTICAL MICROSCOPY; PHOTON EMISSION SCANNING
Descriptors DEC
DIAGNOSTIC TECHNIQUES; ELECTROMAGNETIC RADIATION; MICROSCOPY; RADIATIONS

Optional Information

Secondary number(s)
CONF-9304144--.