Published January 23, 2008 | Version v1
Journal article

Controlled fabrication of patterned lateral porous alumina membranes

  • 1. Laboratoire de Physique des Interfaces et des Couches Minces, Ecole Polytechnique, 91128, Palaiseau (France)
  • 2. Thales Research and Technology, 91128 Palaiseau (France)
  • 3. Samsung Electronics, Giheung-Gu, Yongin-City, Gyeonggi-Do, 446-711 (Korea, Republic of)

Description

Confined lateral alumina templates are fabricated with different pore sizes by changing the acid electrolyte and the anodization voltage. The control of the number of pore rows down to one dimension is also achieved, by controlling the thickness of the starting aluminum film as well as the anodization voltage. We observe that the mechanism of pore formation in the lateral regime is very similar to that in the classical vertical situation

Additional details

Identifiers

DOI
10.1088/0957-4484/19/03/035303;
PII
S0957-4484(08)58313-9;

Publishing Information

Journal Title
Nanotechnology (Print)
Journal Volume
19
Journal Issue
3
Journal Page Range
p. 035303
ISSN
0957-4484

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
39040021
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
ALUMINIUM; ALUMINIUM OXIDES; ANODIZATION; ELECTRIC POTENTIAL; ELECTROLYTES; FABRICATION; MEMBRANES; POROUS MATERIALS; THIN FILMS
Descriptors DEC
ALUMINIUM COMPOUNDS; CHALCOGENIDES; CHEMICAL COATING; CORROSION PROTECTION; DEPOSITION; ELECTROCHEMICAL COATING; ELECTROLYSIS; ELEMENTS; FILMS; LYSIS; MATERIALS; METALS; OXIDES; OXYGEN COMPOUNDS; SURFACE COATING