Published January 23, 2008
| Version v1
Journal article
Controlled fabrication of patterned lateral porous alumina membranes
Creators
- 1. Laboratoire de Physique des Interfaces et des Couches Minces, Ecole Polytechnique, 91128, Palaiseau (France)
- 2. Thales Research and Technology, 91128 Palaiseau (France)
- 3. Samsung Electronics, Giheung-Gu, Yongin-City, Gyeonggi-Do, 446-711 (Korea, Republic of)
Description
Confined lateral alumina templates are fabricated with different pore sizes by changing the acid electrolyte and the anodization voltage. The control of the number of pore rows down to one dimension is also achieved, by controlling the thickness of the starting aluminum film as well as the anodization voltage. We observe that the mechanism of pore formation in the lateral regime is very similar to that in the classical vertical situation
Additional details
Identifiers
- DOI
- 10.1088/0957-4484/19/03/035303;
- PII
- S0957-4484(08)58313-9;
Publishing Information
- Journal Title
- Nanotechnology (Print)
- Journal Volume
- 19
- Journal Issue
- 3
- Journal Page Range
- p. 035303
- ISSN
- 0957-4484
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 39040021
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ALUMINIUM; ALUMINIUM OXIDES; ANODIZATION; ELECTRIC POTENTIAL; ELECTROLYTES; FABRICATION; MEMBRANES; POROUS MATERIALS; THIN FILMS
- Descriptors DEC
- ALUMINIUM COMPOUNDS; CHALCOGENIDES; CHEMICAL COATING; CORROSION PROTECTION; DEPOSITION; ELECTROCHEMICAL COATING; ELECTROLYSIS; ELEMENTS; FILMS; LYSIS; MATERIALS; METALS; OXIDES; OXYGEN COMPOUNDS; SURFACE COATING