Published February 2005 | Version v1
Journal article Metadata-only

Investigation of short-period multilayer diffraction gratings by means of a laboratory X-ray source

Creators

  • 1. Inst. Problem Tekhnologii Mikroehlektroniki i Osobochistykh Materialov RAN, Chernogolovka (Russian Federation)
  • 2. Inst. Optiko-Nejronnykh Tekhnologij, Moscow (Russian Federation)

Description

The W-Si multilayer diffraction grating with the period of 2 μm was designed. Properties of multilayer diffraction grating were investigated using the high resolution X-ray diffraction and X-ray standing wave methods at energy of 17.479 keV (MoKα-radiation)

Abstract (Russian)

Созданы глубокие многослойные дифракционные решетки с периодом 2 мкм на основе многослойных W-Si-зеркал с использованием современных методов микротехнологии. Рентгенооптические свойства многослойных дифракционных решеток исследованы методом высокоразрешающей рентгеновской дифрактометрии и методом стоячих рентгеновских волн при энергии 17.479 кэВ (MoKα-излучения)

Additional details

Additional titles

Original title (Russian)
Исследование многослойных короткопериодных дифракционных решеток на лабораторном источнике рентгеновского излучения

Publishing Information

Journal Title
Poverkhnost'. Rentgenovskie, Sinkhrotronnye i Nejtronnye Issledovaniya
Journal Issue
no.2
Journal Page Range
p. 79-83
ISSN
1028-0960

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
38011496
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
DIFFRACTION GRATINGS; FABRICATION; FLUORESCENCE; LAYERS; MIRRORS; REFLECTION; SCATTERING; SILICON; SPATIAL RESOLUTION; STANDING WAVES; TUNGSTEN; X-RAY DIFFRACTION; X-RAY DIFFRACTOMETERS; X-RAY SOURCES
Descriptors DEC
COHERENT SCATTERING; DIFFRACTION; DIFFRACTOMETERS; ELEMENTS; EMISSION; LUMINESCENCE; MEASURING INSTRUMENTS; METALS; PHOTON EMISSION; RADIATION SOURCES; REFRACTORY METALS; RESOLUTION; SCATTERING; SEMIMETALS; TRANSITION ELEMENTS

Optional Information

Notes
10 refs., 8 figs.