Carbon nanotubes/ceria composite layers deposited on surface acoustic wave devices for gas detection at room temperature
- 1. Université du Sud Toulon, Var, IM2NP, UMR CNRS 6242, BP 20132. F 83 957 LA GARDE (France)
- 2. SENSeOR, Sophia Antipolis, 06250 Mougins (France)
Description
Surface acoustic wave (SAW) sensor on ATquartz piezoelectric substrate has been designed and fabricated. Test devices were based on asynchronous single-port resonators operating near the 434-MHz-centered industrial, scientific, and medical band. Multi-Walled Carbon Nanotubes/Ceria (MWNTs/CeO2) nanocomposites were used as sensitive layers. The MWNTs were synthesized by catalytic chemical vapor deposition method and coated with nanosized ceria oxide. The composites were deposited on SAW quartz resonator using air-brush technique. MWNTs/CeO2 nanocomposites were characterized using X-ray diffraction, transmission electron and atomic force microscopy. The sensor responses were tested under acetone (C3H5OH) and ethanol (C2H5OH) gases. The output signal was done by S11 parameter of the SAW device and was monitored using a network analyzer. Frequency changes were observed under acetone and ethanol vapors. These changes depended on the surface conductivity of the nanocomposites deposited on the sensor. The single-port SAW gas sensor coated with the MWNTs/CeO2 presented the highest sensitivity in the case of acetone vapor interacting with these layers, with a frequency shift of 200 kHz at room temperature.
Availability note (English)
Available from http://dx.doi.org/10.1016/j.tsf.2011.10.166Additional details
Identifiers
- DOI
- 10.1016/j.tsf.2011.10.166;
- PII
- S0040-6090(11)01906-7;
Publishing Information
- Journal Title
- Thin Solid Films
- Journal Volume
- 520
- Journal Issue
- 14
- Journal Page Range
- p. 4786-4791
- ISSN
- 0040-6090
- CODEN
- THSFAP
Conference
- Title
- Synthesis, processing and characterization of nanoscale multi functional oxide films III
- Acronym
- EMRS 2011 spring meeting symposium D
- Dates
- 9-13 May 2011
- Place
- Nice (France)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 43098598
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ACETONE; ATOMIC FORCE MICROSCOPY; CARBON; CERIUM OXIDES; CHEMICAL VAPOR DEPOSITION; COMPOSITE MATERIALS; DETECTION; LAYERS; NANOTUBES; PIEZOELECTRICITY; RESONATORS; SENSITIVITY; SENSORS; SIGNALS; SOUND WAVES; SUBSTRATES; SURFACES; VAPORS; X-RAY DIFFRACTION
- Descriptors DEC
- CERIUM COMPOUNDS; CHALCOGENIDES; CHEMICAL COATING; COHERENT SCATTERING; DEPOSITION; DIFFRACTION; ELECTRICITY; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; FLUIDS; GASES; KETONES; MATERIALS; MICROSCOPY; NANOSTRUCTURES; NONMETALS; ORGANIC COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; RARE EARTH COMPOUNDS; SCATTERING; SURFACE COATING
Optional Information
- Copyright
- Copyright (c) 2011 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.