Published 1988
| Version v1
Miscellaneous
Calculation of a phosphorus ion range in silicon axial channels
Creators
Description
no abstract available
Additional details
Additional titles
- Original title (Russian)
- Расчет пробегов ионов фосфора в осевых каналах кремния
Publishing Information
- Imprint Title
- Summaries of reports of the 18. All-union conference on charged particle interaction with crystals
- Journal Page Range
- p. 128.
- Report number
- INIS-SU--98
Conference
- Title
- 18. All-union conference on charged particle interaction with crystals.
- Dates
- 30 May - 1 Jun 1988.
- Place
- Moscow (USSR).
INIS
- Country of Publication
- USSR
- Country of Input or Organization
- USSR
- INIS RN
- 20053846
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- AMORPHOUS STATE; ENERGY LOSSES; ION CHANNELING; ION IMPLANTATION; KEV RANGE 10-100; PHOSPHORUS IONS; RANGE; SILICON; STOPPING POWER
- Descriptors DEC
- ATOMIC IONS; CHANNELING; CHARGED PARTICLES; ELEMENTS; ENERGY RANGE; IONS; KEV RANGE; SEMIMETALS
Optional Information
- Notes
- Short note; 3 refs. Imprint:Tezisy dokladov 18. Vsesoyuznogo soveshchaniya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami.