Published 1988 | Version v1
Miscellaneous

Calculation of a phosphorus ion range in silicon axial channels

Description

no abstract available

Additional details

Additional titles

Original title (Russian)
Расчет пробегов ионов фосфора в осевых каналах кремния

Publishing Information

Imprint Title
Summaries of reports of the 18. All-union conference on charged particle interaction with crystals
Journal Page Range
p. 128.
Report number
INIS-SU--98

Conference

Title
18. All-union conference on charged particle interaction with crystals.
Dates
30 May - 1 Jun 1988.
Place
Moscow (USSR).

INIS

Country of Publication
USSR
Country of Input or Organization
USSR
INIS RN
20053846
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
AMORPHOUS STATE; ENERGY LOSSES; ION CHANNELING; ION IMPLANTATION; KEV RANGE 10-100; PHOSPHORUS IONS; RANGE; SILICON; STOPPING POWER
Descriptors DEC
ATOMIC IONS; CHANNELING; CHARGED PARTICLES; ELEMENTS; ENERGY RANGE; IONS; KEV RANGE; SEMIMETALS

Optional Information

Notes
Short note; 3 refs. Imprint:Tezisy dokladov 18. Vsesoyuznogo soveshchaniya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami.