Effect of substrate roughness on IBAD-GZO template layer

Gd2Zr2O7 (GZO) layers were deposited on rolled, mirror like polished and electropolished Ni-based alloy (Inconel) tapes by the ion-beam-assisted deposition (IBAD) method and were investigated especially in terms of the effect of substrate roughness on the crystal grain alignment. Their surface roughness, Ra, was 7.6-12.3 nm, 4.3-4.7 nm and 1.4-3.4 nm, respectively. The deposition time was varied from 1 h to 6 h. Crystalline alignment of these films was observed by X-ray diffraction (XRD) and cross-sectional transmission electron microscope (TEM). The grain alignment of the IBAD-GZO was improved by using flat surfaces. GZO film on the electropolished substrate got to align from closer point near the interface than that on rolled substrates