Published 2013
| Version v1
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Mechanisms of improvement of crystallinity quality of silicon layers
- 1. NIIYaF MGU, Moscow (Russian Federation)
- 2. MGU imeni M.V. Lomonosova, Fizicheskij Fakul'tet, Moscow (Russian Federation)
Description
no abstract available
Files
48077089.pdf
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Additional details
Additional titles
- Original title (Russian)
- Механизмы улучшения качества кристалличности слоев кремния
Publishing Information
- Publisher
- Izd-vo MGU
- Imprint Place
- Moscow (Russian Federation)
- Imprint Title
- Summaries of reports of XLIII International Tulinov conference on physics of interactions of charged particles with crystals
- Imprint Pagination
- 182 p.
- Journal Page Range
- p. 137
- Report number
- INIS-RU--604
Conference
- Title
- 43. International Tulinov conference on physics of interactions of charged particles with crystals
- Original Conference Title
- XLIII mezhdunarodnaya Tulinovskaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
- Dates
- 28-30 May 2013
- Place
- Moscow (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 48077089
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- No Abstract, Conference, Numerical Data
- Descriptors DEI
- CRYSTAL STRUCTURE; EPITAXY; EXPERIMENTAL DATA; ION IMPLANTATION; KEV RANGE 100-1000; RADIATION DOSES; RECRYSTALLIZATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SAPPHIRE; SILICON; SUBSTRATES; TEMPERATURE DEPENDENCE; TEMPERATURE RANGE 0013-0065 K; TEMPERATURE RANGE 0065-0273 K; TEMPERATURE RANGE 0273-0400 K; TRANSMISSION ELECTRON MICROSCOPY
- Descriptors DEC
- CORUNDUM; CRYSTAL GROWTH METHODS; DATA; DOSES; ELECTRON MICROSCOPY; ELEMENTS; ENERGY RANGE; INFORMATION; KEV RANGE; MICROSCOPY; MINERALS; NUMERICAL DATA; OXIDE MINERALS; SEMIMETALS; SPECTROSCOPY; TEMPERATURE RANGE
Optional Information
- Notes
- 1 ref. Imprint:Tezisy dokladov XLIII mezhdunarodnoj Tulinovskoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami