PIC-MCC-Simulation of a Cylindrical Magnetron Discharge and Comparison with Experimental Data

Published 2000 | Version v1

Book Metadata-only

1. Institute of Physics, University of Greifswald, Greifswald (Germany)
2. Department of Electronics and Vacuum Physics, Charles University, Prague (Czech Republic)

no abstract available

Additional details

Publisher: Printing Division, Space Research Center, Polish Academy of Sciences, Warsaw, Poland
Imprint Place: Warsaw (Poland)
ISBN: 83-902319-5-6
Imprint Title: 24 International Conference on Phenomena in Ionized Gases Proceedings - Vol. 1
Imprint Pagination: 260 p.
Journal Page Range: p. 181-182

Country of Publication: Poland
Country of Input or Organization: Poland
INIS RN: 33059881
Subject category: S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Resource subtype / Literary indicator: Conference, No Abstract
Descriptors DEI: ARGON; BOLTZMANN EQUATION; CARRIER DENSITY; CHARGED-PARTICLE TRANSPORT; DISTRIBUTION; ELECTRIC FIELDS; ELECTRIC POTENTIAL; ELECTRON DENSITY; ELECTRON MOBILITY; ELECTRON-ELECTRON COLLISIONS; FUNCTIONS; HIGH-FREQUENCY DISCHARGES; ION DENSITY; MAGNETRONS; MONTE CARLO METHOD; PLASMA SIMULATION; SPUTTERING
Descriptors DEC: CALCULATION METHODS; COLLISIONS; DIFFERENTIAL EQUATIONS; ELECTRIC DISCHARGES; ELECTRON COLLISIONS; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUATIONS; EQUIPMENT; FLUIDS; GASES; INTEGRO-DIFFERENTIAL EQUATIONS; KINETIC EQUATIONS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; MOBILITY; NONMETALS; PARTIAL DIFFERENTIAL EQUATIONS; PARTICLE MOBILITY; RADIATION TRANSPORT; RARE GASES; SIMULATION