Published 2000
| Version v1
Miscellaneous
Nitride etching supported by plasma
Creators
- 1. Instytut Mikroelektroniki i Optoelektroniki, Politechnika Warszawska, Warsaw (Poland)
Description
no abstract available
Additional details
Additional titles
- Original title (Polish)
- Trawienie azotkow wspomagane plazma
Publishing Information
- Imprint Title
- Abstracts book of 7. Scientific Conference 'Electronic Technology' ELTE 2000
- Imprint Pagination
- [RP 1-9; RS 1; ME 1-78; MN 1-58; F 1-73; TP 1-48; MG 1-16; MS 1-51]
- Journal Page Range
- p. TP, 36
Conference
- Title
- 7. Scientific Conference 'Electronic Technology' ELTE 2000
- Original Conference Title
- 7. Konferencja Naukowa 'Technologia Elektronowa' ELTE 2000
- Dates
- 18-22 Sep 2000
- Place
- Polanica-Zdroj (Poland)
INIS
- Country of Publication
- Poland
- Country of Input or Organization
- Poland
- INIS RN
- 32031696
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- No Abstract, Conference, Non-conventional Literature
- Descriptors DEI
- ALUMINIUM NITRIDES; BORON NITRIDES; ETCHING; PLASMA; SILICON; SUBSTRATES; SURFACE PROPERTIES
- Descriptors DEC
- ALUMINIUM COMPOUNDS; BORON COMPOUNDS; ELEMENTS; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; SEMIMETALS; SURFACE FINISHING
Optional Information
- Notes
- 1 ref Imprint:Zbior streszczen 7. Konferencja Naukowa 'Technologia Elektronowa' ELTE 2000