Published January 2009 | Version v1
Journal article

On the issue of practical application of the mathematical model of the process of semiconductor crystal oxidation

  • 1. Georgian Technical University, Tbilisi (Georgia)

Description

The problems of the growth of homogeneous, anisotropic oxide layer and the distribution of oxidant molecules in it are considered for the case when the interface between the oxide and the semiconductor crystal is a plane. The iteration method of solution of the given problems was developed. The algorithm for numerical realization of the obtained solutions was composed. (author)

Additional details

Publishing Information

Journal Title
Georgian Engineering News (GEN)
Journal Issue
n.1,2009
Journal Page Range
p. 13-17
ISSN
1512-0287

Optional Information

Notes
3 refs., 1 fig.