Published February 16, 1983 | Version v1
Journal article

Determination of electron depth-dose function for kilovolt electrons on GaAsP

  • 1. Humboldt-Universitaet, Berlin (German Democratic Republic). Sektion Physik

Description

A new technique to determine the depth-dose function is described using the measurement of the electron beam induced barrier current on bevelled homo p-n junction structures. A universal depth-dose function on GaAsP is found in the investigated energy range from 10 to 45 keV. The distance of the maximum under the surface can be obtained by the relation a = A0E/sub P/sup /1.65/ with A0 = 2.95 x 10-3 (E/sub Pr/ in keV, a in μm). (author)

Additional details

Publishing Information

Journal Title
Phys. Status Solidi A
Journal Volume
75
Journal Issue
2
Series
Phys. Status Solidi A.
Journal Page Range
547-553
ISSN
0031-8965