Published June 1, 2010
| Version v1
Journal article
Monocrystalline zinc oxide films grown by atomic layer deposition
Creators
- 1. Polish Academy of Sciences, Institute of Physics, al. Lotnikow 32/46, Warszawa 02-668 (Poland)
- 2. Cardinal Stefan Wyszynski University, College of Science, Department of Mathematics and Natural Sciences, Warszawa (Poland)
- 3. Institute of Electron Technology (ITE), al. Lotnikow 32/46, Warsaw 02-668 (Poland)
Description
In the present work we report on the monocrystalline growth of (00.1) ZnO films on GaN template by the Atomic Layer Deposition technique. The ZnO films were obtained at temperature of 300 oC using dietylzinc (DEZn) as a zinc precursor and deionized water as an oxygen precursor. High resolution X-ray diffraction analysis proves that ZnO layers are monocrystalline with rocking curve FWHM of the 00.2 peak equals to 0.07o. Low temperature photoluminescence shows a sharp and bright excitonic line with FWHM of 13 meV.
Availability note (English)
Available from http://dx.doi.org/10.1016/j.tsf.2009.12.030Additional details
Identifiers
- DOI
- 10.1016/j.tsf.2009.12.030;
- PII
- S0040-6090(09)02012-4;
Publishing Information
- Journal Title
- Thin Solid Films
- Journal Volume
- 518
- Journal Issue
- 16
- Journal Page Range
- p. 4556-4559
- ISSN
- 0040-6090
- CODEN
- THSFAP
Conference
- Title
- Synthesis, processing and characterization of nanoscale multi functional oxide films II
- Acronym
- EMRS 2009 spring meeting Symposium H
- Dates
- 8-12 Jun 2009
- Place
- Strasbourg (France)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 42059908
- Subject category
- S77: NANOSCIENCE AND NANOTECHNOLOGY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- DEPOSITION; EPITAXY; GALLIUM NITRIDES; LAYERS; MILLI EV RANGE; PHOTOLUMINESCENCE; TEMPERATURE RANGE 0400-1000 K; THIN FILMS; X-RAY DIFFRACTION; ZINC OXIDES
- Descriptors DEC
- CHALCOGENIDES; COHERENT SCATTERING; CRYSTAL GROWTH METHODS; DIFFRACTION; EMISSION; ENERGY RANGE; FILMS; GALLIUM COMPOUNDS; LUMINESCENCE; NITRIDES; NITROGEN COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; PHOTON EMISSION; PNICTIDES; SCATTERING; TEMPERATURE RANGE; ZINC COMPOUNDS
Optional Information
- Copyright
- Copyright (c) 2009 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.