Published 1985
| Version v1
Book
The density of sputtered MoS2 films
Description
Methods for the determination of the density of sputtered films of MoS2 are discussed and the problems connected with the determination of the film thickness are elucidated. The density determined for different coating parameters is given and the results are compared with the data of natural MoS2. The deviation from the bulk value is explained by morphological properties of the films. In addition, the influence of sputtering conditions on the structure of the films is mentioned and the results are correlated with these data. (author)
Additional details
Publishing Information
- Publisher
- CEP Consultants Ltd.
- Imprint Place
- Edinburgh (UK)
- Imprint Title
- IPAT 85
- Imprint Pagination
- 507 p.
- Journal Page Range
- p. 272-276.
Conference
- Title
- 5. international conference.
- Acronym
- Ion and plasma assisted techniques
- Dates
- May 1985.
- Place
- Munich (Germany, F.R.).
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- United Kingdom
- INIS RN
- 18058774
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- DENSITY; MICROSTRUCTURE; MOLYBDENUM SULFIDES; SPUTTERING; THICKNESS; THIN FILMS
- Descriptors DEC
- CHALCOGENIDES; CRYSTAL STRUCTURE; DIMENSIONS; FILMS; MOLYBDENUM COMPOUNDS; PHYSICAL PROPERTIES; SULFIDES; SULFUR COMPOUNDS; TRANSITION ELEMENT COMPOUNDS