Published March 1993 | Version v1
Journal article

Standard-free electron-probe microanalysis of thin films of HTSC-oxide and semiconductors (h<1μm)

  • 1. AN SSSR, Moscow (Russian Federation). Inst. Obshchej i Neorganicheskoj Khimii

Description

A simplified variant of the standard-free electron-probe microanalysis is elaborated to carry out rapid analysis of chemical composition of >1μm thickness thin films of high-temperature superconductor oxides and semiconductors on alien substrates. The suggested technique has increased the efficiency of search for optimal conditions of preparation YBa2Cu3Ox thin films existing in magnetron and InSb ion-beam techniques of spraying on SrTiO3 and α-Al2O3 monocrystal base substrates

Additional details

Additional titles

Original title (Russian)
Безэталонный электронно-зондовый микроанализ тонких плёнок ВТСП-оксидов и полупроводников (x < 1 мкм)

Publishing Information

Journal Title
Zhurnal Neorganicheskoj Khimii
Journal Volume
38
Journal Issue
3
Journal Page Range
p. 399-401.
ISSN
0044-457X
CODEN
ZNOKAQ