Published March 1993
| Version v1
Journal article
Standard-free electron-probe microanalysis of thin films of HTSC-oxide and semiconductors (h<1μm)
- 1. AN SSSR, Moscow (Russian Federation). Inst. Obshchej i Neorganicheskoj Khimii
Description
A simplified variant of the standard-free electron-probe microanalysis is elaborated to carry out rapid analysis of chemical composition of >1μm thickness thin films of high-temperature superconductor oxides and semiconductors on alien substrates. The suggested technique has increased the efficiency of search for optimal conditions of preparation YBa2Cu3Ox thin films existing in magnetron and InSb ion-beam techniques of spraying on SrTiO3 and α-Al2O3 monocrystal base substrates
Additional details
Additional titles
- Original title (Russian)
- Безэталонный электронно-зондовый микроанализ тонких плёнок ВТСП-оксидов и полупроводников (x < 1 мкм)
Publishing Information
- Journal Title
- Zhurnal Neorganicheskoj Khimii
- Journal Volume
- 38
- Journal Issue
- 3
- Journal Page Range
- p. 399-401.
- ISSN
- 0044-457X
- CODEN
- ZNOKAQ
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 26014187
- Subject category
- S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Descriptors DEI
- ACCURACY; BARIUM OXIDES; COPPER OXIDES; ELECTRON MICROPROBE ANALYSIS; HIGH-TC SUPERCONDUCTORS; SEMICONDUCTOR MATERIALS; SENSITIVITY; SUBSTRATES; THIN FILMS; YTTRIUM OXIDES
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; BARIUM COMPOUNDS; CHALCOGENIDES; CHEMICAL ANALYSIS; COPPER COMPOUNDS; FILMS; MATERIALS; MICROANALYSIS; NONDESTRUCTIVE ANALYSIS; OXIDES; OXYGEN COMPOUNDS; SUPERCONDUCTORS; TRANSITION ELEMENT COMPOUNDS; YTTRIUM COMPOUNDS