Published February 1977 | Version v1
Journal article Metadata-only

Study of preferential sputtering on binary alloy by in-situ Auger measurement of sputtered and sputter-deposited surfaces

Creators

  • 1. Osaka Univ., Suita (Japan). Faculty of Engineering

Description

In-situ measurements of the sputtered and sputter-deposited surfaces of Cu-Ni (50 wt%) alloy samples have been made using Auger Electron Spectroscopy. The results indicate that variations in surface composition are caused by differential sputtering. The in-situ Auger measurements are of practical use in determining the surface concentration directly, as well as the preferential sputtering factor. (B.D.)

Additional details

Identifiers

DOI
10.1016/0039-6028(77)90114-5;

Publishing Information

Journal Title
Surface Science
Journal Volume
62
Journal Issue
2
Series
Surf. Sci.
Journal Page Range
751-755
ISSN
0039-6028

INIS

Country of Publication
Netherlands
Country of Input or Organization
Netherlands
INIS RN
8323106
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
AUGER ELECTRON SPECTROSCOPY; COPPER ALLOYS; DEPOSITION; INTERMETALLIC COMPOUNDS; LAYERS; NICKEL ALLOYS; SPUTTERING; SURFACES
Descriptors DEC
ALLOYS; ELECTRON SPECTROSCOPY; SPECTROSCOPY; TRANSITION ELEMENT ALLOYS

Optional Information

Notes
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