Synthesis of highly transparent ITO thin films using vacuum evaporation technique

The synthesis of indium tin oxide (ITO) thin films prepared by using thermal evaporation technique under high vacuum conditions and further annealed at different temperature conditions. These films were further characterized by using XRD, SEM, AFM, UV-Visible and Photoluminescence spectroscopy in order to understand the structural and optical properties associated with them. Parameters to synthesize uniform, homogeneous, single phase and highly transparent ITO thin films have been optimized and further used as gas sensors. (author)