Published August 1, 1985
| Version v1
Journal article
Metal film deposition by gas-phase laser pyrolysis of nickel tetracarbonyl
Creators
- 1. Materials Science and Technology Division, Los Alamos National Laboratory, Los Alamos, New Mexico 87545
Description
A new technique for the deposition of nickel metal films by gas-phase pyrolysis of nickel tetracarbonyl gas is described. A pulsed CO2 laser is used to form a reaction zone adjacent to a cold substrate, resulting in a rapidly quenched film. The technique relies on dielectric breakdown of a mixture of source and carrier gases and therefore lends itself to a variety of source gases and chemistries. Adherence data and compositional and structural analyses are presented
Additional details
Publishing Information
- Journal Title
- J. Appl. Phys.
- Journal Volume
- 58
- Journal Issue
- 3
- Series
- J. Appl. Phys.
- Journal Page Range
- 1400-1401
- ISSN
- 0021-8979
- CODEN
- JAPIA
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 17005952
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ARGON; BREAKDOWN; CARBON DIOXIDE LASERS; CARBONYLS; CHEMICAL COMPOSITION; CHEMICAL VAPOR DEPOSITION; DECOMPOSITION; GLASS; IMPURITIES; INFRARED RADIATION; LASER RADIATION; NICKEL; NICKEL COMPOUNDS; PHOTOCHEMISTRY; PYROLYSIS; VAPOR DEPOSITED COATINGS
- Descriptors DEC
- AMPLIFIERS; CHEMICAL COATING; CHEMICAL REACTIONS; CHEMISTRY; COATINGS; DEPOSITION; ELECTROMAGNETIC RADIATION; ELEMENTS; EQUIPMENT; GAS LASERS; LASERS; METALS; NONMETALS; RADIATIONS; RARE GASES; SURFACE COATING; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS