Published March 2017
| Version v1
Journal article
Growth behavior of Bi2Te3 and Sb2Te3 thin films on graphene substrate grown by plasma-enhanced chemical vapor deposition
Creators
- 1. School of Electrical and Electronic Engineering, Yonsei University, Seoul (Korea, Republic of)
- 2. Thin Film Materials Research Group, Korea Research Institute of Chemical Technology, Daejeon (Korea, Republic of)
- 3. School of Electrical Engineering and Computer Science, Gwangju Institute of Science and Technology, Gwangju (Korea, Republic of)
Description
A comparative study of the substrate effect on the growth mechanism of chalcogenide Bi2Te3 and Sb2Te3 thin films was carried out. Obvious microstructural discrepancy in both the as-deposited Bi2Te3 and Sb2Te3 thin films was observed when grown on graphene or SiO2/Si substrate. Bi2Te3 and Sb2Te3 thin films deposited on the graphene substrate were observed to be grown epitaxially along c-axis and show very smooth surface compared to that on SiO2/Si substrate. Based on the experimental results of this study, the initial adsorption sites on graphene substrate during deposition process, which had been discussed theoretically, could be demonstrated empirically. (copyright 2017 WILEY-VCH Verlag GmbH and Co. KGaA, Weinheim)
Availability note (English)
Available from: http://dx.doi.org/10.1002/pssr.201600369Additional details
Identifiers
Publishing Information
- Journal Title
- Physica Status Solidi. Rapid Research Letters (Online)
- Journal Volume
- 11
- Journal Issue
- 3
- Journal Page Range
- p. 1-4
- ISSN
- 1862-6270
- CODEN
- PSSRCS
INIS
- Country of Publication
- Germany
- Country of Input or Organization
- Germany
- INIS RN
- 48053582
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ADSORPTION; ANTIMONY TELLURIDES; BISMUTH TELLURIDES; CHEMICAL VAPOR DEPOSITION; COMPARATIVE EVALUATIONS; EPITAXY; FIELD EMISSION; GRAPHENE; MICROSTRUCTURE; PLASMA; ROUGHNESS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; SURFACES; THICKNESS; THIN FILMS; X-RAY DIFFRACTION
- Descriptors DEC
- ANTIMONY COMPOUNDS; BISMUTH COMPOUNDS; CARBON; CHALCOGENIDES; CHEMICAL COATING; COHERENT SCATTERING; CRYSTAL GROWTH METHODS; DEPOSITION; DIFFRACTION; DIMENSIONS; ELECTRON MICROSCOPY; ELEMENTS; EMISSION; EVALUATION; FILMS; MICROSCOPY; NONMETALS; SCATTERING; SORPTION; SURFACE COATING; SURFACE PROPERTIES; TELLURIDES; TELLURIUM COMPOUNDS
Optional Information
- Notes
- With 4 figs.