Structural analysis of In/Ag, In/Cu and In/Pd thin films on tungsten by ellipsometric, XRD and AES methods
Creators
- 1. Institute of Mathematics and Physics, University of Technology and Life Sciences, Kaliskiego 7, PL-85-796 Bydgoszcz (Poland)
Description
Compositional, microstructural and optical properties of In/Cu, In/Ag and In/Pd thin films evaporated on W substrate in a vacuum were investigated by means of Auger electron spectroscopy, X-ray diffractometry, scanning electron microscopy, and spectroscopic ellipsometry methods. Thicknesses of deposited pure metal layers were adjusted to atomic concentration ratios In:Ag = 1:2, In:Cu = 2:1 and In:Pd = 3:1. Interdiffusion of metals and creation of intermetallic compounds AgIn2, Ag2In and CuIn2were detected at room temperature. Phase transformation and changes in the surface morphology due to annealing of samples at 393 K for 60 min were revealed. Combined investigations indicated a layered structure of In/Ag films. A tendency of island-like structure formation was stronger for In/Cu and In/Pd films. The complex dielectric functions <ε-tilde(E)>=<ε1(E)>+i<ε2(E)> of In/Ag, In/Cu and In/Pd composite layers were determined from spectroellipsometric data
Availability note (English)
Available from http://dx.doi.org/10.1016/j.apsusc.2008.01.006Additional details
Identifiers
- DOI
- 10.1016/j.apsusc.2008.01.006;
- PII
- S0169-4332(08)00076-7;
Publishing Information
- Journal Title
- Applied Surface Science
- Journal Volume
- 254
- Journal Issue
- 14
- Journal Page Range
- p. 4401-4407
- ISSN
- 0169-4332
- CODEN
- ASUSEE
Conference
- Title
- 3. international workshop on surface physics - Nanostructures on surface
- Acronym
- IWSP-2007
- Dates
- 10-15 Sep 2007
- Place
- Polanica-Zdroj (Poland)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 40030018
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ANNEALING; AUGER ELECTRON SPECTROSCOPY; CONCENTRATION RATIO; COPPER; DIELECTRIC MATERIALS; ELLIPSOMETRY; INDIUM; INTERMETALLIC COMPOUNDS; LAYERS; MICROSTRUCTURE; MORPHOLOGY; OPTICAL PROPERTIES; PALLADIUM; PHASE TRANSFORMATIONS; SCANNING ELECTRON MICROSCOPY; SILVER; SUBSTRATES; SURFACES; TEMPERATURE RANGE 0273-0400 K; THIN FILMS; TUNGSTEN; X-RAY DIFFRACTION
- Descriptors DEC
- ALLOYS; COHERENT SCATTERING; DIFFRACTION; DIMENSIONLESS NUMBERS; ELECTRON MICROSCOPY; ELECTRON SPECTROSCOPY; ELEMENTS; FILMS; HEAT TREATMENTS; MATERIALS; MEASURING METHODS; METALS; MICROSCOPY; PHYSICAL PROPERTIES; PLATINUM METALS; REFRACTORY METALS; SCATTERING; SPECTROSCOPY; TEMPERATURE RANGE; TRANSITION ELEMENTS
Optional Information
- Copyright
- Copyright (c) 2008 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.