ACCURACY LIMITATIONS IN LONG TRACE PROFILOMETRY

As requirements for surface slope error quality of grazing incidence optics approach the 100 nanoradian level, it is necessary to improve the performance of the measuring instruments to achieve accurate and repeatable results at this level. We have identified a number of internal error sources in the Long Trace Profiler (LTP) that affect measurement quality at this level. The LTP is sensitive to phase shifts produced within the millimeter diameter of the pencil beam probe by optical path irregularities with scale lengths of a fraction of a millimeter. We examine the effects of mirror surface ''macroroughness'' and internal glass homogeneity on the accuracy of the LTP through experiment and theoretical modeling. We will place limits on the allowable surface ''macroroughness'' and glass homogeneity required to achieve accurate measurements in the nanoradian range.