Published March 1984
| Version v1
Journal article
Mechanisms of cone formation by ion bombardment
Creators
- 1. Institut za Nuklearne Nauke Boris Kidric, Belgrade (Yugoslavia)
Description
In this paper, cone formation due to the sputtering of CuAg alloy and cylindrical geometry solids (amorphous and crystalline wires) bombarded by Ar+ ions has been considered. Two basic mechanisms which apply to the bombarded alloy surface are: different sputtering rate of alloy components and different defect concentration and stopping power along the ion range in the crystal. The results also show previously reported mechanisms of cone formation such as a masking effect of impurity atoms and the angular dependence of sputtering. (orig.)
Additional details
Publishing Information
- Journal Title
- Nucl. Instrum. Methods Phys. Res., Sect. B
- Journal Volume
- 230
- Journal Issue
- 1-3
- Series
- CODEN: NIMBE.;Nucl. Instrum. Methods Phys. Res., Sect. B.
- Journal Page Range
- 645-648
- ISSN
- 0168-583X
Conference
- Title
- 10. international conference on atomic collisions in solids.
- Dates
- 18-22 Jul 1983.
- Place
- Bad Iburg (Germany, F.R.).
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Netherlands
- INIS RN
- 15065398
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference, Numerical Data
- Descriptors DEI
- ARGON IONS; CHEMICAL COMPOSITION; COPPER ALLOYS; EXPERIMENTAL DATA; GLASS; GOLD; QUARTZ; SCANNING ELECTRON MICROSCOPY; SILICON OXIDES; SILVER ALLOYS; SPUTTERING; SURFACES; TANTALUM; TOPOGRAPHY; WIRES
- Descriptors DEC
- ALLOYS; CHALCOGENIDES; CHARGED PARTICLES; DATA; ELECTRON MICROSCOPY; ELEMENTS; INFORMATION; IONS; METALS; MICROSCOPY; MINERALS; NUMERICAL DATA; OXIDE MINERALS; OXIDES; OXYGEN COMPOUNDS; SILICON COMPOUNDS; TRANSITION ELEMENTS