Published March 1984 | Version v1
Journal article

Mechanisms of cone formation by ion bombardment

  • 1. Institut za Nuklearne Nauke Boris Kidric, Belgrade (Yugoslavia)

Description

In this paper, cone formation due to the sputtering of CuAg alloy and cylindrical geometry solids (amorphous and crystalline wires) bombarded by Ar+ ions has been considered. Two basic mechanisms which apply to the bombarded alloy surface are: different sputtering rate of alloy components and different defect concentration and stopping power along the ion range in the crystal. The results also show previously reported mechanisms of cone formation such as a masking effect of impurity atoms and the angular dependence of sputtering. (orig.)

Additional details

Publishing Information

Journal Title
Nucl. Instrum. Methods Phys. Res., Sect. B
Journal Volume
230
Journal Issue
1-3
Series
CODEN: NIMBE.;Nucl. Instrum. Methods Phys. Res., Sect. B.
Journal Page Range
645-648
ISSN
0168-583X

Conference

Title
10. international conference on atomic collisions in solids.
Dates
18-22 Jul 1983.
Place
Bad Iburg (Germany, F.R.).