Possibility for rapid generation of high-pressure phases in single-crystal silicon by fast nanoindentation
Creators
- 1. Department of Mechanical Engineering, Keio University, Yokohama 223-8522 (Japan)
Description
High-pressure phases of silicon such as Si-XII/Si-III exhibit attractive optical, electrical and chemical properties, but until now, it has been technologically impossible to produce a significant quantity of Si-XII or Si-III. In this study, to explore the possibility of generating high-pressure silicon phases efficiently, comparative nanoindentation experiments were conducted. Effects of the loading rate, unloading rate and maximum indentation load were investigated, and key factors affecting the high-pressure phase formation were identified. A new nanoindentation protocol is proposed that introduces an intermediate holding stage into the unloading process. The resulting end phases under the indent were detected by a laser micro-Raman spectrometer and compared with those formed in conventional nanoindentation. The results indicate that high-pressure phases Si-XII and Si-III were successfully formed during the intermediate holding stage even with a very high loading/unloading rate. This finding demonstrates the possibility of rapid production of high-pressure phases of silicon through fast mechanical loading and unloading. (paper)
Availability note (English)
Available from http://dx.doi.org/10.1088/0268-1242/30/11/115001Additional details
Identifiers
Publishing Information
- Journal Title
- Semiconductor Science and Technology
- Journal Volume
- 30
- Journal Issue
- 11
- Journal Page Range
- [7 p.]
- ISSN
- 0268-1242
- CODEN
- SSTEET
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 47076875
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- CHEMICAL PROPERTIES; COMPARATIVE EVALUATIONS; LASERS; LOADING; LOADING RATE; MONOCRYSTALS; PRESSURE RANGE MEGA PA 10-100; SILICON; SPECTROMETERS; UNLOADING
- Descriptors DEC
- CRYSTALS; ELEMENTS; EVALUATION; MATERIALS HANDLING; MEASURING INSTRUMENTS; PRESSURE RANGE; PRESSURE RANGE MEGA PA; SEMIMETALS