Non-Maxwellian to Maxwellian transitions of atmospheric microplasmas at microwave frequencies

Particle-in-cell/Monte Carlo simulations and numerical analysis of a single particle motion are performed for atmospheric He microplasmas at microwave frequencies to determine the characteristics of non-Maxwellian to Maxwellian transition. The left and the right regimes of Paschen curve, divided by this transition, reveal that the transition frequencies depend on the gap of electrodes and the neutral gas pressure to follow scaling laws for a new extended Paschen law. The fluid models are reasonable at the right-side regime of Paschen breakdown areas, but not on the left side, which is highly kinetic for electrons. The plasmas driven by weaker electric fields of high enough frequencies at the right-side Paschen regime breed more energetic electrons.