Published April 1, 2021 | Version v1
Journal article

Broadband dielectric spectroscopic detection of volatile organic compounds with ZnO nanorod gas sensors

  • 1. Department of Electrical and Computer Engineering, Old Dominion University, Norfolk VA 23529 (United States)
  • 2. Department of Electrical and Computer Engineering, University of Minnesota, 200 Union Street SE, Minneapolis, MN 55455 (United States)
  • 3. Physical Measurement Laboratory, National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899 (United States)

Description

Metal-oxide (MO) semiconductor gas sensors based on chemical resistivity necessarily involve making electrical contacts to the sensing materials. These contacts are imperfect and introduce errors into the measurements. In this paper, we demonstrate the feasibility of using contactless broadband dielectric spectroscopy (BDS)-based metrology in gas monitoring that avoids distortions in the reported resistivity values due to probe use, and parasitic errors (i.e. tool–measurand interactions). Specifically, we show how radio frequency propagation characteristics can be applied to study discrete processes on MO sensing material, such as zinc oxide (i.e. ZnO) surfaces, when exposed to a redox-active gas. Specifically, we have used BDS to investigate the initial oxidization of ZnO gas sensing material in air at temperatures below 200 °C, and to show that the technique affords new mechanistic insights that are inaccessible with the traditional resistance-based measurements. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/1361-6463/abd3ce

Additional details

Identifiers

Publishing Information

Journal Title
Journal of Physics. D, Applied Physics
Journal Volume
54
Journal Issue
13
Journal Page Range
[8 p.]
ISSN
0022-3727
CODEN
JPAPBE