Published September 1, 2018 | Version v1
Journal article

Electrode configuration and electrical dissipation of mechanical energy in quartz crystal resonators

  • 1. Department of Applied Physics, Aalto University, PO Box 15100, FI-00076 AALTO, Espoo (Finland)

Description

Mechanical resonators made with monolithic piezoelectric quartz crystals are promising for studying new physical phenomena. High mechanical quality factors (Q) exhibited by the mm-sized quartz resonators make them ideal for studying weak couplings or long timescales in the quantum regime. However, energy losses through mechanical supports pose a serious limiting factor for obtaining high quality factors. Here we investigate how the Q of quartz resonators at deep cryogenic temperatures can be limited by several types of losses related to anchoring. We first introduce means to reduce the mechanical losses by more than an order of magnitude in a no-clamping scheme, obtaining Q-factors of 108 of the lowest shear mode. We can exclude a wide coverage of aluminum metalization on the disk or bond wires as sources of dissipation. However, we find a dramatic reduction of the Q-factor accompanying an electrode configuration that involves strong focusing of the vibrations in the disk center. We propose a circuit model that accounts for the reduced mechanical Q-factor in terms of electrical losses. In particular, we show how the limiting factor for losses can be small ohmic dissipation in a grounding connection, which can be interpreted as electrical anchor losses of the mechanical device. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/1361-6439/aac781

Additional details

Identifiers

Publishing Information

Journal Title
Journal of Micromechanics and Microengineering (Print)
Journal Volume
28
Journal Issue
9
Journal Page Range
[9 p.]
ISSN
0960-1317
CODEN
JMMIEZ

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
51065749
Subject category
S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; S42: ENGINEERING;
Descriptors DEI
ALUMINIUM; CRYOGENICS; CRYSTALS; ELECTRODES; ENERGY LOSSES; FOCUSING; PIEZOELECTRICITY; QUALITY FACTOR; QUARTZ; RESONATORS; WIRES
Descriptors DEC
DIMENSIONLESS NUMBERS; ELECTRICITY; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; LOSSES; METALS; MINERALS; OXIDE MINERALS