Published 1975
| Version v1
Book
Directional effects and secondary ion emission
Description
Experiment and theory have shown that ejection of an atom is inducted by collisions taking place essentially in the first layers of the target. The direction of bombardment with respect to the crystal is therefore very important. The implantation of incident ions and the precipitation of the ions implanted were studied, together with the influence of temperature and of the azimuth position of the target on these phenomena. To use the secondary ion emission in analysis it is necessary to eliminate directional effects and hence avoid channeling. Attempts were therefore made to obtain a thin amorphous layer on the crystal surface either by chemisorption of oxygen or by bombardment with polyatomic ions
Abstract (French)
L'experience et la theorie ont montre que l'ejection d'un atome est induite par des collisions qui ont lieu essentiellement dans les premieres couches de la cible. La direction du bombardement par rapport au cristal a donc une grande importance. On a etudie l'implantation des ions incidents et la precipitation des ions implantes ainsi que le role de la temperature et de la position azimutale de la cible sur ces phenomenes. Pour utiliser l'emission ionique secondaire, en analyse, il faut supprimer les effets directionnels et donc eviter la canalisation. On a donc cherche a amorphiser les cristaux sur une faible epaisseur en surface soit par chimisorption d'oxygene soit par bombardement par des ions polyatomiquesAdditional details
Additional titles
- Original title (French)
- Effets direcionnels en emission ionique secondaire
Publishing Information
- Publisher
- Institut National des Sciences et Techniques Nucleaires.
- Imprint Place
- Saclay, France
- Imprint Title
- Meeting on particle channeling. Description and applications. Saclay, 27-31 May 1974
- Imprint Pagination
- p. 185-207.
Conference
- Title
- Meeting on particle channeling.
- Dates
- 27 May 1974.
- Place
- Saclay, France.
INIS
- Country of Publication
- France
- Country of Input or Organization
- France
- INIS RN
- 6216279
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- CHANNELING; CRYSTAL DEFECTS; ION EMISSION; ION IMPLANTATION; ION-ATOM COLLISIONS; SECONDARY EMISSION; TEMPERATURE DEPENDENCE
- Descriptors DEC
- ATOM COLLISIONS; COLLISIONS; CRYSTAL STRUCTURE; EMISSION; ION COLLISIONS
Optional Information
- Notes
- Imprint:Session d'etudes sur la canalisation des particules. Description et applications. Saclay, 27-31 mai 1974.