Adhesion and stressed state of CdGa2Se4 films

Dependence of adhesion strength and internal macrostresses in CdGa2Se4 films on the conditions of sputtering differing by energy of condenced vapour particles is investigated. Adhesion strength of CdGa2Se4 films is stated to increase with the growth of rate of vapour particles. Thermal screen reduces adhesion strength of films at all the modes of pulsed laser evaporation. Temperature growth in the substrate under sputtering results in equivalent change in the rate of vapour particles in the 102-106 cm/s range increasing total internal macrostresses of films, but it becomes irrevercible above 400 K that may be associated with phase transformations in films of digallium-cadmium tetraselenide