Application of X-ray fluorscence analysis with total-reflection (TXRF) in material science

A device was constructed to determine elements of low atomic number by non-destructive TXRF analysis. It consists of a Cr-X-ray tube, an optimized reflection unit, a detector with an extremely thin entrance window, a low noise amplifier, and a sample changer. To minimize the absorption losses, the main parts are placed in a vacuum chamber with a very thin Be window. Using this arrangement it is possible to measure elements down to oxygen from the pg-to the ng-range. (orig.)