Kinetics and mechanism of pickling of metal films of vanadium and chromium subgroup in halogen-containing high-frequency discharge

The mechanism and kinetics of pickling of metal films of vanadium and chromium subgroup in halogen-containing discharge are considered. It has been found out that for metals of chromium subgroup oxygen additions increase their pickling rate both in chlorine and fluorine-containing discharge. On the contrary, for metals of vanadium subgroup the increase of pickling rate with oxygen additions is observed only in fluorine-containing discharge, in chlorine-containing discharge the rate of the process decreases