Hydrocarbon plasma chemistry in a continuous microwave discharge

A study is made of the relation between the kinetic processes involving carbon-containing species and the intensity ratios of different emission lines in synthesizing diamond films in a microwave discharge plasma. The intensity ratios of the emission lines are measured as functions of the pressure, composition, and flow rate of the gas mixture. The kinetic processes involving carbon-containing components are simulated under conditions close to the experimental ones. It is shown that the intensity ratios of different pairs of lines can be used to control diamond film deposition