Published March 16, 1989 | Version v1
Journal article Metadata-only

Modification of surface layers of molybdenum by B+ and N+ ion implantation

Creators

  • 1. Ceskoslovenska Akademie Ved, Prague (Czechoslovakia). Fyzikalni Ustav
  • 2. Iron and Steel Research Institute, Karlstejn (Czechoslovakia)
  • 3. AN SSSR, Moscow (USSR). Inst. Metallurgii
  • 4. State Research Institute for the Protection of Materials, Prague (Czechoslovakia)
  • 5. Ceskoslovenska Akademie Ved, Rez (Czechoslovakia). Ustav Jaderne Fyziky

Description

B+ and N+ ion implantation into Mo single crystals and low alloyed polycrystalline Mo is carried out with doses from 4 x 1016 to 4 x 1017 cm-2. Thin foils prepared from the implanted specimens are investigated by TEM and diffraction. In all cases an amorphous subsurface layer and a highly damaged crystalline region beneath are observed. In the crystalline part of the N+ implanted specimens the diffraction reveals three phases: β-Mo2C, γ-Mo2N and N solution in Mo. In B+ implanted specimens small amounts of Mo2BC and molybdenum oxides are identified besides the B-Mo solid solution after a 1200 0C vacuum anneal. (author)

Additional details

Publishing Information

Journal Title
Physica Status Solidi A
Journal Volume
112
Journal Issue
1
Series
Phys. Status Solidi A.
Journal Page Range
335-338
ISSN
0031-8965
CODEN
PSSAB

Conference

Title
International conference on ion implantation in semiconductors and other materials.
Dates
12-17 Sep 1988.
Place
Lublin (Poland).

INIS

Country of Publication
Germany
Country of Input or Organization
German Democratic Republic
INIS RN
20064754
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
AMORPHOUS STATE; ANNEALING; BORON ISOTOPES; ELECTRON DIFFRACTION; ION BEAMS; ION IMPLANTATION; MOLYBDENUM; MOLYBDENUM BASE ALLOYS; MOLYBDENUM BORIDES; MOLYBDENUM CARBIDES; MOLYBDENUM NITRIDES; MOLYBDENUM OXIDES; MONOCRYSTALS; NITROGEN 14 BEAMS; PHASE STUDIES; PHYSICAL RADIATION EFFECTS; POLYCRYSTALS; SOLID SOLUTIONS; SURFACES; TRANSMISSION ELECTRON MICROSCO
Descriptors DEC
ALLOYS; BEAMS; BORIDES; BORON COMPOUNDS; CARBIDES; CARBON COMPOUNDS; CHALCOGENIDES; COHERENT SCATTERING; CRYSTALS; DIFFRACTION; DISPERSIONS; ELECTRON MICROSCOPY; ELEMENTS; HEAT TREATMENTS; HOMOGENEOUS MIXTURES; METALS; MICROSCOPY; MIXTURES; MOLYBDENUM ALLOYS; MOLYBDENUM COMPOUNDS; NITRIDES; NITROGEN COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; RADIATION EFFECTS; SCATTERING; SOLUTIONS; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS