Published July 1994
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Determination of trace elements in a silicon single crystal
Creators
- 1. Kyoto Univ., Kumatori, Osaka (Japan). Research Reactor Inst.
Description
Neutron activation analysis was applied to the determination of trace impurity elements in a silicon ingot. Detection limits of 36 elements were calculated semi-empirically and compared with minimum concentrations detected in a silicon single crystal. The sources of the impurities were estimated from elemental concentrations detected in polycrystalline silicon and a quartz crucible. Segregation coefficients were determined from the concentration curves in a single crystal and discussed by comparing with reported values. (author)
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Additional details
Publishing Information
- Imprint Title
- Proceeding of symposium on the fundamental knowledge and application of neutron activation analysis by a reactor
- Imprint Pagination
- 318 p.
- Journal Page Range
- p. 61-73.
- Report number
- KURRI-TR--393
Conference
- Title
- Symposium on the fundamental knowledge and application of neutron activation analysis by a reactor.
- Dates
- 21-22 Dec 1992; 9 Nov 1993; 15-16 Feb 1994.
- Place
- Kumatori, Osaka (Japan).
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 27007445
- Subject category
- S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ALUMINIUM 28; ALUMINIUM 29; IMPURITIES; MAGNESIUM 27; NEUTRON ACTIVATION ANALYSIS; QUANTITATIVE CHEMICAL ANALYSIS; SEMICONDUCTOR MATERIALS; SILICON; SILICON 31; TRACE AMOUNTS
- Descriptors DEC
- ACTIVATION ANALYSIS; ALUMINIUM ISOTOPES; BETA DECAY RADIOISOTOPES; BETA-MINUS DECAY RADIOISOTOPES; CHEMICAL ANALYSIS; ELEMENTS; EVEN-ODD NUCLEI; HOURS LIVING RADIOISOTOPES; ISOTOPES; LIGHT NUCLEI; MAGNESIUM ISOTOPES; MATERIALS; MINUTES LIVING RADIOISOTOPES; NONDESTRUCTIVE ANALYSIS; NUCLEI; ODD-EVEN NUCLEI; ODD-ODD NUCLEI; RADIOISOTOPES; SEMIMETALS; SILICON ISOTOPES