Published July 1984 | Version v1
Journal article

Determination of residual impurities in InP grown by the Czochralski method, using charged particle activation analysis

  • 1. Centre National de la Recherche Scientifique, Orleans (France). Service du Cyclotron
  • 2. Centre National d'Etudes des Telecommunications (CNET), Centre de Recherches de Lannion, 22 (France)

Description

InP samples were analyzed by charged particle activation analysis. Proton activation at 12 MeV permits the nondestructive survey of 30 elements. The main impurities are Ti, Fe, Ga and Zn (1015 to 2.1016 at/cm3). Oxygen was analyzed by triton activation at 3 MeV; the oxygen concentration is normally less than 1016 at/cm3. (author)

Additional details

Publishing Information

Journal Title
J. Radioanal. Nucl. Chem.
Journal Volume
83
Journal Issue
1
Series
J. Radioanal. Nucl. Chem.
Journal Page Range
91-97
ISSN
0236-5731

Conference

Title
3. meeting on nuclear analytical methods.
Dates
11-15 Apr 1983.
Place
Dresden (German Democratic Republic).

Optional Information

Notes
6 refs.