High-current pulsed operation modes of the planar mss with magnetically insulated anode without transition to the arc discharge

In this work, the characteristics of high-current operation modes of planar magnetron sputtering system with magnetically insulated anode without going to the arc discharge mode is investigated. The possibility of using an additional spatially modulated magnetic field in the anode region to prevent a transition from the magnetron to the arc is shown experimentally. It is shown that the use of such a magnetic field configuration provides efficient interruption of the arc current without external forced shutdown of the discharge.