Published February 2018 | Version v1
Journal article

CVD growth of fingerprint-like patterned 3D graphene film for an ultrasensitive pressure sensor

  • 1. Tsinghua University, Key Laboratory of Organic Optoelectronics and Molecular Engineering of the Ministry of Education, Department of Chemistry and Center for Nano and Micro Mechanics (CNMM) (China)

Description

With the rapid development of wearable devices, flexible pressure sensors with high sensitivity and wide workable range are highly desired. In nature, there are many well-adapted structures developed through natural selection, which inspired us for the design of biomimetic materials or devices. Particularly, human fingertip skin, where many epidermal ridges amplify external stimulations, might be a good example to imitate for highly sensitive sensors. In this work, based on unique chemical vapor depositions (CVD)-grown 3D graphene films that mimic the morphology of fingertip skin, we fabricated flexible pressure sensing membranes, which simultaneously showed a high sensitivity of 110 (kPa)−1 for 0–0.2 kPa and wide workable pressure range (up to 75 kPa). Hierarchical structured PDMS films molded from natural leaves were used as the supporting elastic films for the graphene films, which also contribute to the superior performance of the pressure sensors. The pressure sensor showed a low detection limit (0.2 Pa), fast response (< 30 ms), and excellent stability for more than 10,000 loading/unloading cycles. Based on these features, we demonstrated its applications in detecting tiny objects, sound, and human physiological signals, showing its potential in wearable electronics for health monitoring and human/machine interfaces. .

Additional details

Identifiers

Publishing Information

Journal Title
Nano Research (Print)
Journal Volume
11
Journal Issue
2
Journal Page Range
p. 1124-1134
ISSN
1998-0124

INIS

Country of Publication
China
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
51018003
Subject category
S77: NANOSCIENCE AND NANOTECHNOLOGY;
Descriptors DEI
CASTING MOLDS; CHEMICAL VAPOR DEPOSITION; GRAPHENE; MORPHOLOGY; PERFORMANCE; PRESSURE MEASUREMENT; SENSITIVITY; SKIN; STIMULATION; THIN FILMS
Descriptors DEC
BODY; CARBON; CHEMICAL COATING; DEPOSITION; ELEMENTS; FILMS; NONMETALS; ORGANS; SURFACE COATING

Optional Information

Copyright
Copyright (c) 2018 Tsinghua University Press and Springer-Verlag GmbH Germany