Published September 2010
| Version v1
Journal article
The Influence of Argon on the Deposition and Structure of Polycrystalline Diamond Films
- 1. Department of Bases of Theoretical Biomedical Studies and Medical Computer Science, Collegium Medicum, Nicolaus Copernicus University, Jagiellonska 13, 85-067 Bydgoszcz (Poland)
- 2. Institute of Physics, Faculty of Physics, Astronomy and Informatics, Nicolaus Copernicus University, Grudziadzka 5, 87-100 Torun (Poland)
Description
Thin polycrystalline diamond films were deposited on prepared (100) Si substrate by hot filament chemical vapor deposition using a mixture of hydrogen, propane-butane and argon. During investigations the gas flow of argon was varied from 100 sccm to 400 sccm. Scanning electron microscopy analysis revealed that the addition of argon to the gas phase influenced the growth rate and film structure. An increase of argon concentration provokes an increase in film porosity and decrease in crystalline facetting. The quality of these films was investigated with the use of the Raman spectroscopy. (authors)
Additional details
Additional titles
- Augmented title (English)
- PACS numbers: 68.55.A-
Identifiers
Publishing Information
- Journal Title
- Acta Physica Polonica. Series A (Online)
- Journal Volume
- 118
- Journal Issue
- 3
- Journal Page Range
- p. 447-449
- ISSN
- 1898-794X
Conference
- Title
- Fabrication, Modification and Investigations of Novel Forms of Carbon
- Acronym
- 8. Torunian Carbon Symposium
- Dates
- 2-5 Sep 2009
- Place
- Torun (Poland)
INIS
- Country of Publication
- Poland
- Country of Input or Organization
- Poland
- INIS RN
- 43001833
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ARGON; BUTANE; CHEMICAL VAPOR DEPOSITION; DEPOSITION; DIAMONDS; FILMS; HYDROCARBONS; HYDROGEN; POLYCRYSTALS; PROPANE; SILICON; THIN FILMS
- Descriptors DEC
- ALKANES; CARBON; CHEMICAL COATING; CRYSTALS; DEPOSITION; ELEMENTS; FILMS; FLUIDS; GASES; HYDROCARBONS; MINERALS; NONMETALS; ORGANIC COMPOUNDS; RARE GASES; SEMIMETALS; SURFACE COATING
Optional Information
- Notes
- 7 refs., 3 figs., 3 tabs.