Published February 1995
| Version v1
Journal article
Surface processes on plasmochemical deposition of A2B6 semiconducting films
- 1. Nizhegorodskij Gosudarstvennyj Univ., Nizhnij Novgorod (Russian Federation)
Description
The development of complex model of plasma-induced deposition from organometallic compounds of qualitative layers of CdTe, HgTe and GdxHg1-xTe was continued. The model permits explaining experimental temperature dependences of the layers growth rate and composition and tracing appearance of the non-random regularity in filling cationic sublattice with Cd and Hg atoms as a consequence of certain surface-kinetic properties of adatoms. The concrete type of stable nucleus on the surface and important role of chemical desorption at moderate growth temperatures are made allowance for. 19 refs.; 6 figs.; 1 tab
Additional details
Additional titles
- Original title (Russian)
- Поверхностные процессы при плазмохимическом осаждении пленок полупроводниковых соединений А
Publishing Information
- Journal Title
- Zhurnal Tekhnicheskoj Fiziki
- Journal Volume
- 65
- Journal Issue
- 2
- Journal Page Range
- p. 76-86.
- ISSN
- 0044-4642
- CODEN
- ZTEFA3
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 26076223
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- CADMIUM TELLURIDES; CHEMICAL COATING; CRYSTAL GROWTH; HIGH-FREQUENCY DISCHARGES; MATHEMATICAL MODELS; MERCURY TELLURIDES; PLASMA; SOLID SOLUTIONS; THIN FILMS
- Descriptors DEC
- CADMIUM COMPOUNDS; CHALCOGENIDES; DEPOSITION; DISPERSIONS; ELECTRIC DISCHARGES; FILMS; HOMOGENEOUS MIXTURES; MERCURY COMPOUNDS; MIXTURES; SOLUTIONS; SURFACE COATING; TELLURIDES; TELLURIUM COMPOUNDS