Published August 1982
| Version v1
Journal article
Investigation of a laser-plasma source of soft x rays operating at laser power densities 5 x 1011--2 x 1014 W/cm2
- 1. P. N. Lebedev Physics Institute, Academy of Sciences of the USSR, Moscow
Description
A study was made of the efficiency of conversion of target-heating laser radiation into x rays emitted by a plasma in a wide range of laser radiation power densities (5 x 1011--2 x 1014 W/cm2) and atomic numbers of the target material (4--92). Estimates were obtained of the exposure dose needed for x-ray photolithography of resists when such a laser-plasma source of soft x rays was used
Additional details
Publishing Information
- Journal Title
- Sov. J. Quant. Electron. (Engl. Transl.)
- Journal Volume
- 12
- Journal Issue
- 8
- Series
- Sov. J. Quant. Electron. (Engl. Transl.).
- Journal Page Range
- 977-980
- ISSN
- 0049-1748
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 14789918
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Descriptors DEI
- EFFICIENCY; LASER RADIATION; LASER TARGETS; LASER-PRODUCED PLASMA; POWER; RADIATION DOSES; X RADIATION
- Descriptors DEC
- ELECTROMAGNETIC RADIATION; IONIZING RADIATIONS; PLASMA; RADIATIONS; TARGETS
Optional Information
- Notes
- Cover-to-cover translation of Kvantovaya Ehlektronika (USSR).