Published 2003
| Version v1
Journal article
Solid ion source based on hollow-cylindrical magnetron sputtering discharge
- 1. Kharkov National University, Kharkov (Ukraine)
- 2. Max-Plank Institut fur Plasmaphysik, Garching (Germany)
- 3. Institute of Plasma Physics, NSC 'Kharkov Institute of Physics and Technology', Kharkov (Ukraine)
Description
A new solid ion source is described. The ion source based on hollow-cylindrical magnetron sputtering discharge produces the beam of various solid ions (B, C, Si, Ti, V, Fe, Ni, Ta, W) which are then extracted by an ion optical accelerating system. In this ion source DC discharge is used for generation of the ions of different metals and capacitively coupled RF discharge with a frequency 13.56 MHz is used for generation of the ions of other solid materials
Additional details
Publishing Information
- Journal Title
- Problems of Atomic Science and Technology. Series: Plasma Physics
- Journal Issue
- no.1/9/
- Journal Page Range
- p. 125-127
- ISSN
- 1682-9344
INIS
- Country of Publication
- Ukraine
- Country of Input or Organization
- Ukraine
- INIS RN
- 35093917
- Subject category
- S43: PARTICLE ACCELERATORS;
- Descriptors DEI
- BEAM EXTRACTION; CATHODES; ELECTRIC FIELDS; HIGH-FREQUENCY DISCHARGES; ION SOURCES; MAGNETIC FIELDS; MAGNETRONS; METALS; PLASMA PRODUCTION; SPUTTERING; TARGETS
- Descriptors DEC
- ELECTRIC DISCHARGES; ELECTRODES; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; MICROWAVE EQUIPMENT; MICROWAVE TUBES