Published April 2000 | Version v1
Journal article Metadata-only

Features of transport processes in a silicon-aluminium system with a titanium sublayer

Creators

  • 1. Ul'yanovskij Gosudarstvennyj Univ., Ul'yanovsk (Russian Federation)

Description

The study of diffusion processes in the thin film system of Si-Ti-Al with use of oscillographic method, controllable chemical dissolution and Auger electron spectroscopy was carried out. The interaction of components with the participation of processes of both boundary, and three-dimensional diffusion was noted. It explains extreme changes of the concentrations of atoms of silicon and aluminium on the interphase boundary of Si-Ti, as well as dimensional and thermal features of titanium sublayer

Abstract (Russian)

Исследованы диффузионные процессы в тонкопленочной системе Si-Ti-Al c использованием осциллографического метода, контролируемого химического растворения и оже-электронной спектроскопии. Отмечено твердофазное взаимодействие компонентов с участием процесов граничной и объемной диффузии. Этим объяснены экспериментальные изменения концентраций атомов Si и Al на межфазной границе Si-Ti, а также размерных и тепловых характеристик подслоя Ti

Additional details

Additional titles

Original title (Russian)
Особенности транспортных процессов в системе кремний-алюминий с подслоем титана

Publishing Information

Journal Title
Poverkhnost'. Rentgenovskie, Sinkhrotronnye i Nejtronnye Issledovaniya
Journal Issue
no.4
Journal Page Range
p. 64-67
ISSN
1028-0960

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
33024561
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
ALUMINIUM; ANNEALING; BIMETALS; CORROSION; DIFFUSION; INTERFACES; SILICON; SPATIAL DISTRIBUTION; SUBSTRATES; TEMPERATURE RANGE 0400-1000 K; THIN FILMS; TIME DEPENDENCE; TITANIUM
Descriptors DEC
CHEMICAL REACTIONS; DISTRIBUTION; ELEMENTS; FILMS; HEAT TREATMENTS; METALS; SEMIMETALS; TEMPERATURE RANGE; TRANSITION ELEMENTS

Optional Information

Notes
12 refs.; 6 figs.