Application of machine learning for the estimation of electron energy distribution from optical emission spectra

This paper discusses the use of probabilistic deep neural networks for the prediction of the electron energy probability function in low-temperature non-thermal plasmas. The neural networks are trained using optical emission spectroscopy and Langmuir probe measurements, with the goal of providing a reliable estimate of the electron energy probability function solely from optical emission data. The performance of both non-Bayesian and Bayesian networks is evaluated. It is found that Bayesian models are preferable as they assign a higher level of uncertainty to their prediction especially when the dataset used to train them is small. This work describes one of the many potential applications of machine learning in plasma science and technology. (paper)