Published November 12, 1987
| Version v1
Journal article
Production of high thickness implanted layer
- 1. AN SSSR, Tomsk. Inst. Sil'notochnoj Ehlektroniki
Description
The possibilities of consecutive implantation and spray-coating method (CISC) for obtaining materials with implanted addition given profile were investigated. Taking nitrogen ions implantation as example, it is shown, that it is possible to control nitrogen distribution profile configuration by spray-coating of titanium layers with different thickness and by implantation dose change. Implanted layer thickness is determined by CISC cycle number
Additional details
Additional titles
- Original title (Russian)
- Возможности получения имплантированных слоев большой толщины
Publishing Information
- Journal Title
- Pis'ma Zh. Tekh. Fiz.
- Journal Volume
- 13
- Journal Issue
- 21
- Series
- Pis'ma Zh. Tekh. Fiz.
- Journal Page Range
- 1303-1306
- CODEN
- PZTFD
INIS
- Country of Publication
- USSR
- Country of Input or Organization
- USSR
- INIS RN
- 19071799
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ION IMPLANTATION; LAYERS; NITROGEN IONS; SURFACE COATING; THICKNESS; TITANIUM
- Descriptors DEC
- CHARGED PARTICLES; DEPOSITION; DIMENSIONS; ELEMENTS; IONS; METALS; TRANSITION ELEMENTS