Monolithic ionizing particle detector based on active matrix of functionally integrated structures

Highlights: • A new type of monolithic silicon position detector is presented. • An operating principle, design and technology of the detector are described. • Calculated estimations of the detecting efficiency are carried out. • Experimental results of alpha-particle and electron detection are shown. -- Abstract: An operating principle, design and technology of a new type of the monolithic silicon position detector (MSPD) for registration of ionizing particles and photons are described. The detector represents a specialized monolithic silicon VLSI that contains a two-dimensional detecting matrix of active functionally integrated bipolar structures and peripheral electronic circuitry for signal amplification and processing. This paper presents experimental results of α-particles and electrons detection with position accuracy and operation speed better than 12.5 μm and 1 ns, respectively. The given estimations show the capabilities of this detector and its advantages in comparison with analogs