Time resolved CoSi2 reaction in presence of Ti and TiN cap layers
- 1. CNR-IMM Sezione Catania, Stradale Primosole 50, 95121 Catania (Italy)
- 2. Dipartimento di Fisica e Astronomia dell'Universita di Catania, Via S. Sofia 64, 95123 Catania (Italy)
Description
In this work we study the phase transition of Co/poly-Si layers capped with Ti or TiN films. Silicide reaction has been performed by isothermal annealing in the temperature range between 420 and 510 deg. C and studied by measuring the sheet resistance during time. The time interval associated to the CoSi-CoSi2 phase transition has been extracted as a function of the cap layer and the annealing temperature. The presence of the Ti cap systematically reduces the rate of CoSi2 formation with respect to the sample with TiN. It has been found that the cap type has an impact on the pre-exponential factor of the growth time but it does not affect the activation energy. As an effect, the silicide capped with Ti has a flat interface with the substrate
Additional details
Identifiers
- DOI
- 10.1016/j.mseb.2004.07.021;
- PII
- S0921-5107(04)00317-4;
Publishing Information
- Journal Title
- Materials Science and Engineering. B, Solid-State Materials for Advanced Technology
- Journal Volume
- 114-115
- Journal Page Range
- p. 232-235
- ISSN
- 0921-5107
- CODEN
- MSBTEK
Conference
- Title
- Symposium B: Material science issues in advanced CMOS source-drain engineering
- Acronym
- EMRS spring meeting 2004
- Dates
- 24-28 May 2004
- Place
- Strasbourg (France)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37114324
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ACTIVATION ENERGY; ANNEALING; COBALT SILICIDES; CRYSTAL GROWTH; FILMS; INTERFACES; LAYERS; PHASE TRANSFORMATIONS; SILICON OXIDES; SUBSTRATES; TEMPERATURE DEPENDENCE; TIME RESOLUTION; TITANIUM NITRIDES; X-RAY SPECTROSCOPY
- Descriptors DEC
- CHALCOGENIDES; COBALT COMPOUNDS; ENERGY; HEAT TREATMENTS; NITRIDES; NITROGEN COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; PNICTIDES; RESOLUTION; SILICIDES; SILICON COMPOUNDS; SPECTROSCOPY; TIMING PROPERTIES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS
Optional Information
- Copyright
- Copyright (c) 2004 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.