Published 1999
| Version v1
Miscellaneous
Thick film sensors - and what's next?
Creators
- 1. Institute of Microsystem Technology, Wroclaw University of Technology, Wroclaw (Poland)
Description
This paper presents the development of the different kind of the sensors. All investigated sensors are fabricated using thick film technology. Authors describe sensors, which are prepared by Solid State Electronic Department. The necessity to apply of full diagnostic of sensors is presented. Authors also discuss the problems of the sensor quality. The solution of these construction, technological and measurement problems enables scientists to do a good sensors. (author)
Additional details
Additional titles
- Augmented title (English)
- Li, and rare earths containing materials
Publishing Information
- Imprint Title
- Proceedings of 23. Conference of the International Microelectronics and Packing Society Poland Chapter
- Imprint Pagination
- 400 p.
- Journal Page Range
- p. 35-50
Conference
- Title
- 23. Conference of the International Microelectronics and Packing Society Poland Chapter
- Dates
- 21-23 Sep 1999
- Place
- Koszalin, Kolobrzeg (Poland)
INIS
- Country of Publication
- Poland
- Country of Input or Organization
- Poland
- INIS RN
- 32001277
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference, Non-conventional Literature
- Descriptors DEI
- CERIUM OXIDES; CHROMATES; ELECTROCHEMICAL CELLS; FILMS; GAS ANALYSIS; HUMIDITY; LITHIUM SULFATES; MAGNESIUM COMPOUNDS; MICROELECTRONICS; MICROSTRUCTURE; PLATINUM; RHODIUM CHLORIDES; SILVER SULFATES; THERMISTORS; TIN OXIDES; TITANIUM OXIDES; TRANSDUCERS; X-RAY DIFFRACTION; ZINC COMPOUNDS
- Descriptors DEC
- ALKALI METAL COMPOUNDS; ALKALINE EARTH METAL COMPOUNDS; CERIUM COMPOUNDS; CHALCOGENIDES; CHLORIDES; CHLORINE COMPOUNDS; CHROMIUM COMPOUNDS; COHERENT SCATTERING; DIFFRACTION; ELEMENTS; HALIDES; HALOGEN COMPOUNDS; LITHIUM COMPOUNDS; METALS; MOISTURE; OXIDES; OXYGEN COMPOUNDS; PLATINUM METALS; RARE EARTH COMPOUNDS; REFRACTORY METAL COMPOUNDS; RHODIUM COMPOUNDS; SCATTERING; SEMICONDUCTOR DEVICES; SILVER COMPOUNDS; SULFATES; SULFUR COMPOUNDS; TIN COMPOUNDS; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS
Optional Information
- Contract/Grant/Project number
- KBN grants nos 8T10C 03113 and 8T11B 05116
- Notes
- 29 refs, 21 figs, 1 tab