Microfabrication of Fresnel zone plates by laser induced solid ablation

A novel and simple single-step method of inscribing optical elements on metal-coated transparent substrates is demonstrated. Laser induced solid ablation (LISA) demands very low laser energies (nJ), as can be amply provided by a femtosecond laser oscillator. Here, LISA is used to write Fresnel zone plates on indium and tungsten coated glass. With up to 100 zones, remarkable agreement is obtained between measured and expected values of the focal length. LISA has enabled attainment of focal spot sizes that are 38% smaller than what would be obtained using conventional lenses of the same numerical aperture. The simplicity with which a high degree of automation can readily be achieved using LISA makes this cost-effective method amenable to a wide variety of applications related to microfabrication of optical elements. (paper)