Published May 2002 | Version v1
Journal article

Characterization of High Dose Mn, Fe, and Ni implantation into p-GaN

  • 1. Department of Physics, Seoul National University, Seoul (Korea, Republic of)
  • 2. Corning Applied Technologies, Woburn, Massachusetts 01801 (United States)
  • 3. SVT Associates, Eden Prairie, Minnesota 55344 (United States)
  • 4. Institute of Rare Metals, Moscow (Russian Federation)
  • 5. Army Research Office, Research Triangle Park, North Carolina 27709 (United States)
  • 6. Stevenson Ranch, California 95131 (United States)
  • 7. Agere Systems, Murray Hill, New Jersey 07974 (United States)
  • 8. Department of Physics, University of Florida, Gainesville, Florida 32611 (United States)
  • 9. Department of Materials Science and Engineering, University of Florida, Gainesville, Florida 32611 (United States)

Description

The magnetization of p-GaN or p-AlGaN/GaN superlattices was measured after implantation with high doses (3-5x1016 cm-2) of Mn, Fe, or Ni and subsequent annealing at 700-1000 deg. C. The samples showed ferromagnetic contributions below temperatures ranging from 190-250 K for Mn to 45-185 K for Ni and 80-250 K for Fe. The use of superlattices to enhance the hole concentration did not produce any change in ferromagnetic ordering temperature. No secondary phase formation was observed by x-ray diffraction, transmission electron microscopy, or selected area diffraction pattern analysis for the doses we employed

Additional details

Identifiers

Publishing Information

Journal Title
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
Journal Volume
20
Journal Issue
3
Journal Page Range
p. 721-724
ISSN
0734-2101
CODEN
JVTAD6

Optional Information

Notes
(c) 2002 American Vacuum Society.